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AERIS™ / PRECISION CHEMICAL DELIVERY

Measure the chemistry.
Control the process.

Precision pumping, metering, mixing, and delivery—from benchtop volumes to bulk chemical systems—with no moving parts in the pumping path.

MATECH Aeris Precision benchtop chemical delivery and metering system
DELIVERY RESOLUTION <1 mL PROGRAM-CONTROLLED MASS METERING
01 Precision mass metering
02 No moving pumping parts
03 Self-priming operation
04 Modular system architecture

01 — DELIVERY ADVANTAGE

Precision without the
usual compromise.

Aeris combines MATECH’s patented positive-displacement piston-less pumping technology with a precision mass-metering system. It measures the chemical actually delivered—not merely an inferred flow rate.

The same architecture supports small-volume formulation and high-volume chemical delivery. Accuracy, pumping speed, mixing ratios, and delivery sequences remain under program control across benchtop, bulk, and custom systems.

SOURCE MASS
METER
TARGET

POSITIVE DISPLACEMENT / PISTON-LESS / PROGRAM CONTROLLED

02 — HOW IT WORKS

Move. Measure.
Adjust. Deliver.

01

Move

The Aeris Precision Engine transfers fluid using a controlled positive-displacement, piston-less pumping cycle.

02

Measure

Mass metering tracks the quantity of chemical delivered with resolution below 1 mL.

03

Control

AerisSoft manages pumping speed, metering-valve frequency, ramp-down, recipes, and delivery endpoints.

Aeris Precision Engine fluid-handling architecture with no moving pumping parts in the chemical path AERIS PRECISION ENGINE / NO MOVING PARTS IN THE PUMPING PATH

03 — PRECISION ENGINE

The precision engine behind
Aeris.

At the core of every Aeris system is a compact fluid-handling architecture that meters and transfers chemicals without conventional moving components in the chemical path.

The result is precise delivery, broad chemical compatibility, reduced contamination risk, and a system architecture that scales from point-of-use benchtop delivery to bulk chemical distribution and OEM integration.

04 — SYSTEM CONFIGURATIONS

One precision engine.
Multiple scales of delivery.

Select the source capacity, channel count, receiving arrangement, process conditioning, and controls that fit the application. Systems can expand as requirements evolve.

MATECH Aeris Precision benchtop chemical delivery and metering system

0 1 / AERIS

Benchtop

Point-of-use precision

Milliliter-level chemical delivery and mixing for a bench, hood, laboratory, or process area, with enclosed source bottles and a removable receiving reservoir.

Up to three chemical channels →
MATECH Aeris Precision bulk chemical delivery system with external chemical bay

0 2 / AERIS

Bulk

High-volume delivery

Precision delivery from bottles, carboys, or 55-gallon drums to a conditioned reservoir or directly to process equipment, without sacrificing metering accuracy.

Expandable from 3 to 12 channels →
MATECH Aeris Precision modular chemical delivery cabinet

0 3 / AERIS

Custom / OEM

Application-specific integration

The Aeris Precision Engine, controls, fluid paths, source cabinets, and destination interfaces can be configured around a tool or production requirement.

Modular architecture →
Close view of the Aeris Precision control panel and enclosed fluid path AERIS PRECISION / ENCLOSED CHEMICAL-HANDLING SYSTEM

05 — PURITY & RELIABILITY

Designed to remove common failure points.

With no impellers, diaphragms, pistons, or dynamic seals in the pumping engine, Aeris reduces wear-related maintenance and particle generation. Dedicated chemical paths help prevent cross-contamination.

0 Moving parts in the pumping path
25+ ft Self-priming lift with water-density fluids
3–12 Available bulk-system channels

06 — APPLICATIONS

Built around the chemistry and the process.

Aeris systems can be configured for corrosive chemicals, high-purity service, solvents, controlled mixing, point-of-use delivery, bulk distribution, and equipment integration.

Request a system evaluation →
0 1 Semiconductor chemical delivery
0 2 Precision formulation and mixing
0 3 Bulk transfer and distribution
0 4 Temperature-controlled reservoirs
0 5 Cleanroom and high-purity service
0 6 Custom equipment and OEM integration

START WITH THE CHEMISTRY

Tell us what you need to
move, meter, mix, or deliver.

MATECH can configure an Aeris system around your chemicals, volumes, accuracy, throughput, facility, and process-interface requirements.

Talk with an engineer ↗