02 — TECHNICAL ARCHIVE
Process technology,
in the literature.
Selected papers from MATECH’s technical archive covering WaveEtch™, LinearScan™, wafer thinning, texturing, packaging, and ultrathin-wafer handling.
Extending Process Flexibility for Single-wafer Wet Etch
A technical examination of a single-wafer wet-processing architecture designed to separate chemical reaction from transport limitations and expand process flexibility across substrate types and geometries.
Open paper ↗Single Sided Wafer Thinning for 3D Integration
Field results for high-uniformity, single-sided wet thinning of wafers to 50 µm or below, with emphasis on 3D wafer-level integration, process uniformity, and elimination of backside protection.
Open paper ↗Wafer Thinning for 3D Integration
A broader look at wafer thinning as an enabling technology for increased package density and 3D integration as conventional feature-size scaling approaches practical limits.
Open paper ↗Single Sided Wet Etching for Texturing, Thinning, and Packaging Applications
A conference paper describing LinearScan™ wet processing for controlled texturing, thinning, stress relief, and packaging applications, including very thin and fragile substrates.
Open paper ↗Single Sided Wafer Thinning and Handling
A discussion of chemical thinning and non-contact handling approaches for ultrathin wafers, addressing warpage, fragility, stress relief, and practical production handling.
Open paper ↗